New AMC and Epi Monitors for Semiconductor Manufacturers

Three New Products Showcased at SEMICON West

With the shift to lower deposition temperatures and pressures, moisture has become the main culprit in oxide defects. The HALO QRP, developed for manufacturers using Low-temperature Epitaxy (LT-Epi), can monitor each process step and report real-time moisture concentration to the tool control system.

Tiger Optics also has specialized in addressing the demanding challenges of continuous AMC monitoring for semiconductor fabrication. Based on Tiger's new global platform, the T-I Max line excels in detecting ppt levels of the three most damaging contaminants in cleanrooms: HCl, HF, and NH3.

At SEMICON West, Tiger Optics also unveiled its redesigned mobile cart to package its analyzers for cleanroom environments. The GO-cart can easily accommodate up to four T-I Max analyzers. Small, light, yet sturdy, the cart also provides great convenience and control with the top-mounted central touchscreen.

Apoyamos a Nuestros Amigos Afectados por el Terremoto en Méjico

En apoyo a nuestros amigos y clientes frente a la devastación del terremoto en Méjico, las compañías hermanas Tiger Optics y MEECO están haciendo coincidir las contribuciones de nuestros empleados 1:1. Los alentamos a que se unan a nosotros contribuyendo a la Cruz Roja o a la caridad de su elección. 

Improved Formaldehyde Detection

HALO 3 CH2O now with 2.5 ppb MDL

Detecting low-ppb levels of formaldehyde is extremely important for ensuring quality of hydrogen for fuel cell electric vehicles (FCEVs). Recognizing the stringent requirements for this application, Tiger Optics now offers improved detection limits for CH2O in N2 and H2, helping to ensure SAE J2719 or ISO 14687 compliance.

We Support Our Friends Afflicted by Recent Hurricanes

In support of our friends and customers facing the devastation of hurricanes Harvey, Irma and Maria, sister companies Tiger Optics and MEECO are matching our employees' contributions 2:1. We encourage you to join us by contributing to Habitat for Humanity or the charity of your choice. You will be in good company!

As one sage put it:
"Faith is the bird that feels the light when the dawn is still dark."


Apoyamos a Nuestros Amigos Afectados por los Recientes Huracanes

En apoyo a nuestros amigos y clientes frente a la devastación de los huracanes Harvey, Irma y María, las compañías hermanas Tiger Optics y MEECO están haciendo coincidir las contribuciones de nuestros empleados 2:1. Los alentamos a que se unan a nosotros contribuyendo a Hábitat para la Humanidad o a la caridad de su elección. Usted estará en buena compañía!

Como dijo un sabio:
"La fe es el pájaro que siente la luz cuando el amanecer todavía está oscuro."



Measuring H2O and HF Impurities in NF3 Gas

Nitrogen Fluoride (NF3) has several important industrial uses today, including manufacturing of semiconductor chips, flat panel displays, and solar cells. With increasing demand for LED / OLED displays, the global market for NF3 is expected to continue to soar over the next several years.

In the electronics industry, the main use for NF3 gas is for cleaning process chambers in the manufacturing of silicon chips. The benefits of using NF3 compared to other cleaning agents include safety, stability at room temperature, ease of handling, and lower greenhouse gas emissions than its predecessors.

Tiger Optics HALO product family can detect down to single-digit parts-per-billion (ppb) levels of H2O and HF in NF3, guaranteeing product purity for the end-users. The main advantages of Tiger’s CRDS over incumbent technologies like FTIR, for this application, are:

  • Significantly lower gas consumption
  • Excellent accuracy
  • Long term stability
  • Ease of use


Measuring Ammonia and Moisture in Nitrous Oxide

Nitrous Oxide (N2O) is commonly used in semiconductor manufacturing for the diffusion and deposition processes, where the purity requirement for semiconductor grade N2O is typically greater than 99.999%. Due to chemical reactivity, ammonia (NH3) and moisture (H2O) are two of the most critical impurities to control in the N2O product. To ensure sufficient product purity for end-users, gas manufacturers must monitor these contaminants to ensure their concentrations are below sub parts-per-million (ppm) levels.

Tiger Optics’ HALO analyzers are the perfect solution for trace NH3 and H2O analysis in N2O product. They are ideally suited for ppb-to-ppm range measurements, with extremely fast response time (T90 < 3 minutes). The calibration-free advantage of Tiger analyzers also significantly decreases maintenance cost and total Cost-of-Ownership. Please visit our website or contact us for more information.


Leading Labs Turn to Tiger

Tiger Optics is a standard bearer in a growing number of national metrology institutes around the globe. Since its first sale to the Dutch VSL in May, 2001, Tiger has gained acceptance at 22 national metrology institutes. Many of the institutes use Tiger instruments as a transfer standard to calibrate their own gas standards for research and industrial use. Some institutes also employ Tiger analyzers in their research of such problems as acid rain and global warming. Prized for their proven precision, excellent repeatability, and rapid throughput, as well as their extraordinary dynamic range (four+ orders of magnitude), Tiger’s CW-CRDS analyzers serve foremost institutes in these nations.