Semiconductor fabrication plants require the purest gases to insure that defects are not introduced onto the wafers during the manufacturing process. Tiger Optics sells devices to semiconductor manufacturers, original equipment manufacturers, and the gas companies that supply the ultra-high-purity gases to the “fabs”.
A standard-setter in the measurement of moisture in bulk gases, Tiger Optics also provides solutions for measuring O2 and CH4 in bulk gases. Tiger devices also monitor moisture in gases such as C2F6, C4F8, CF4, CL2, HBr, HCl, N2O, and SF6. The customer may also customize the gas menu on a Tiger device to detect contaminants in gas mixtures.
Beyond the process gas applications, Tiger has extended the applications of its CRDS technology to include monitoring for ambient molecular contamination in clean-room air. In such settings, the Tiger-i family of products can measure HCl, HF, H2S, or NH3 to parts-per-billion levels.
See how two of our analyzers compare against the Servomex DF-749 based on tests performed by the National Metrology Institute of Japan here.