High-Purity Gases & Systems

Applications

Based upon Tiger’s performance, the SEMI F-112 standard calls out CRDS as the technology of choice in determining moisture dry-down characteristics of high-purity gas systems. To check incoming or point-of-use quality, Tiger’s CRDS analyzers monitor for O2, H2O, CH4, CO, CO2 and more down to parts-per-billion (ppb) and even parts-per-trillion (ppt) levels. Special low pressure (LP) versions of the HALO and LaserTrace lines monitor for impurities in hydrides, including arsine, phosphine and ammonia.

The high potential for atmospheric leaks during cylinder and truck fill, as well as in gas delivery, storage and distribution systems, drives the requirement for continuous on-site production monitoring at the world’s leading semiconductor fabs. Typically, H2, N2, Ar, He and O2 are monitored for trace H2O, O2 and CH4 contamination. Other contaminants that may be monitored are CO, CO2, and acid gases.

The recent addition of air and CDA to the measurement list addresses the latest Lithography requirements. For qualifying new gas lines and welds, dry Ar and N2 are typically used. To ensure gas quality throughout the fab, monitoring is also performed at gas cylinders, in addition to the lines following a cylinder exchange and at purifiers to verify their functionality.

Select applications include:

Bulk Gas & Methane Specialty Gas High Quality Piping Qualification

 

Overview of analyzers for analysis in bulk gases

 

Overview of analyzers for analysis in specialty gases (NH3, PH3, AsH3)

Related Resources

Tiger Optics Takes on the Servomex DF-749
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Moisture Measurement Best Practices Review
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"Big Physics"
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CRDS Becomes Method of Choice for F112
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Trace Water Vapor Analysis Using Cavity Ring Down Spectroscopy, Oscillator Quartz Crystal and Impedance Sensor Technologies
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Moisture Measurement Best Practices Review
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Tiger Optics Takes on the Servomex DF-749
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HALO KA H2O Specifications Technical Bulletin
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Tiger Optics Analyzers for Semi (Handout)
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SEMI F112 Application Note
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Tiger Optics Hails Section of CRDS for New Industry Standard
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The Hard Truth About Moisture in Electronic Grade Oxygen
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Laser-Based Analyzers - Shining New Stars
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Timed to Perfection
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Applied Spectroscopy H2O in PH3 by CRDS
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Detection of Trace Water Vapor in High-Purity Phosphine Using Cavity Ring-down Spectroscopy
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Qualitative Comparison of Cavity Ring-Down vs. Direct Measurement Absorption Spectroscopy for Determining ppb Moisture Levels in UHP Gases
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Parts-Per-Trillion Moisture Measurement Using Cavity Ring-Down Spectroscopy
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