T-I Max HCl

Next-Generation AMC Monitor

Applications

  • Airborne Molecular Contaminants
  • Research & Development
Detection and Matrix Range Target LDL (3σ/100s) Target Precision (1σ/100s)
HCl in Cleanroom Air0 – 4 ppm45 ppt15 ppt
Target Performance
Operation range See Detection Capability table
Detection limit (LDL, 3σ@100s) See Detection Capability table
Precision (1σ@100s) at zero See Detection Capability table
Precision (1σ@100s) at span ± 0.5%
Accuracy (greater of) ± 4% or the LDL
Speed of response (@ 20 ppb) <1 minute T10/90
  <1 minute T90/10
Environmental conditions 15°C to 30°C, 40% to 60% RH (non-condensing)
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Optimized for ppt-level AMCs and fast speed of response
Gas connections 1/4" PFA Swagelok® inlet & outlet
Leak tested to 1 x 10-9 mbar l /sec
Inlet pressure 0 – 15 psig (1 – 2 bara)
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼2.5 slpm @ 1 atm inlet pressure
Sample gases Cleanroom air, clean dry air (CDA) or N2
Gas temperature Up to 60°C
Dimensions
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
GO-cart 50" x 23" x 36" (1270 mm x 584 mm x 914 mm)
Weight
Standard sensor 33 lbs (15 kg)
GO-cart 260 lbs (118 kg)
(excl. vacuum pump)  
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485
Data storage Internal or external flash drive
Patents
U.S. Patent # 7,277,177  
   
*Vacuum source with >2 slpm @ 10 Torr required  
Product still in development, final performance
specifications may vary
 
Title / Description

GO-cart AMC Cart Brochure (PDF)

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