Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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HALO Specification Summary

Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 H2O
Trace moisture analyzer for ultra-high-purity gases

H2O in N2 0 – 20 ppm 1.2 ppb 0.4 ppb ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.25 ppb 0.1 ppb
H2O in Ar 0 – 9 ppm 0.6 ppb 0.2 ppb
H2O in H2 0 – 16 ppm 1.0 ppb 0.4 ppb
H2O in O2 0 – 12 ppm 0.7 ppb 0.25 ppb
H2O in Clean Dry Air (CDA) 0 – 18 ppm 1.2 ppb 0.4 ppb
H2O in CO 0 – 24 ppm 1.5 ppb 0.5 ppb
H2O in CO2 0 – 25 ppm 2.0 ppb 0.7 ppb
H2O in COS 0 – 23 ppm 12 ppb 4 ppb
H2O in Ne 0 – 5 ppm 0.3 ppb 0.1 ppb
H2O in Kr 0 – 11 ppm 0.6 ppb 0.2 ppb
H2O in Xe 0 – 13 ppm 0.8 ppb 0.3 ppb
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
1.5 ppb 0.5 ppb
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
3 ppb 1.0 ppb
H2O in HBr 0 – 100 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 1.0 ppb 0.4 ppb
H2O in NF3 0 – 20 ppm 2.5 ppb 0.9 ppb
H2O in CF4 0 – 15 ppm 4 ppb 1.2 ppb
H2O in C2F6 0 – 15 ppm 3 ppb 1.0 ppb
H2O in C3F8 0 – 20 ppm 3 ppb 1.0 ppb
H2O in C4F6 0 – 25 ppm 150 ppb 50 ppb
H2O in C4F8 0 – 20 ppm 3 ppb 1.0 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3Q H2O
Sub-part-per-billion detection limits for H2O

H2O in N2 0 – 20 ppm 0.6 ppb 0.2 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.12 ppb 0.04 ppb
H2O in Ar 0 – 9 ppm 0.3 ppb 0.1 ppb
H2O in H2 0 – 16 ppm 0.4 ppb 0.12 ppb
H2O in O2 0 – 10 ppm 0.3 ppb 0.1 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA H2O
Part-per-trillion detection limits for H2O

H2O in N2 0 – 20 ppm 300 ppt 100 ppt ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 100 ppt 20 ppt
H2O in Ar 0 – 9 ppm 130 ppt 45 ppt
H2O in H2 0 – 16 ppm 200 ppt 70 ppt
H2O in O2 0 – 10 ppm 150 ppt 50 ppt
H2O in Clean Dry Air (CDA) 0 – 18 ppm 300 ppt 100 ppt
H2O in CO 0 – 24 ppm 600 ppt 200 ppt
H2O in CO2 0 – 25 ppm 800 ppt 300 ppt
H2O in 1% GeH4/99% H2 0 – 16 ppm 7 ppb 2.5 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 35 ppb 12 ppb
H2O in COS 0 – 23 ppm 4 ppb 1.4 ppb
H2O in Ne 0 – 5 ppm 100 ppt 30 ppt
H2O in Kr 0 – 11 ppm 160 ppt 60 ppt
H2O in Xe 0 – 13 ppm 250 ppt 90 ppt
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
650 ppt 220 ppt
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
1200 ppt 400 ppt
H2O in HBr 0 – 50 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 400 ppt 140 ppt
H2O in NF3 0 – 20 ppm 600 ppt 200 ppt
H2O in CF4 0 – 15 ppm 800 ppt 300 ppt
H2O in C2F6 0 – 15 ppm 1200 ppt 400 ppt
H2O in C3F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C4F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C5F8 0 – 32 ppm 8 ppb 3 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO
Trace-level carbon monoxide detection

CO in H2 0 – 2000 ppm 100 ppb 70 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
CO in N2 0 – 2000 ppm 100 ppb 70 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO2
Part-per-billion carbon dioxide detection
CO2 in N2 (low range) 0 – 12 ppm 10 ppb 7 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
CO2 in N2 (high range) 0 – 1500 ppm 300 ppb 250 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH4
Trace methane analyzer for high-purity gases

CH4 in N2 0 – 8 ppm 2.0 ppb 1.6 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 30 – 125 psig
CH4 in He 0 – 5 ppm 1.3 ppb 1.1 ppb
CH4 in Ar 0 – 7 ppm 1.7 ppb 1.4 ppb
CH4 in H2 0 – 8 ppm 2.0 ppb 1.6 ppb
CH4 in O2 0 – 6 ppm 1.4 ppb 1.1 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HF
Trace hydrogen fluoride in pressurized gases

HF in N2 0 – 5 ppm 0.5 ppb 0.4 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
HF in SF6 0 – 8 ppm 1.5 ppb 1.2 ppb
HF in NF3 0 – 7.5 ppm 0.75 ppb 0.6 ppb
HF in CF4 0 – 6 ppm 1.0 ppb 0.8 ppb
HF in C2F6 0 – 12 ppm 2.0 ppb 1.6 ppb
HF in C3F8 0 – 12 ppm 2.0 ppb 1.6 ppb
HF in C4F6 0 – 15 ppm 20 ppb 15 ppb
HF in C4F8 0 – 14 ppm 2.0 ppb 1.6 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HCl
Trace hydrogen chloride
HCl in N2 0 – 15 ppm 2.5 ppb* 1.7 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
HCl in Clean Dry Air (CDA) 0 – 15 ppm 2.5 ppb* 1.7 ppb
*with <2000ppm H2O in sample gas
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO LP H2O
Trace moisture in hydride gases
H2O in NH3 0 – 20 ppm 12 ppb 9 ppb ± 4% or ½ LDL ± 1% or 1/3 of Sensitivity up to 1.0 slpm 10 – 125 psig
H2O in PH3 0 – 10 ppm 12 ppb 9 ppb
H2O in N2 0 – 6 ppm 1.4 ppb 1.0 ppb
H2O in Ar 0 – 4 ppm 1.4 ppb 1.0 ppb
H2O in H2 0 – 6 ppm 1.0 ppb 0.8 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.8 ppb
H2O in NO 0 – 100 ppm 20 ppb 16 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO RP H2O
Trace moisture for sub-atmospheric pressure (as low as 50 Torr)
H2O in H2 0 – 20 ppm 3.5 ppb 2.8 ppb ± 4% or ½ LDL ± 1% or ⅓ sensitivity up to 1.0 slpm 50 Torr – 15 psig
H2O in N2 0 – 20 ppm 3.5 ppb 2.8 ppb
H2O in Ar 0 – 20 ppm 2.0 ppb 1.6 ppb
H2O in He 0 – 12 ppm 1.0 ppb 0.8 ppb
H2O in HCl
(may require Hastelloy®)
0 – 25 ppm 4.0 ppb 3.2 ppb
Product Detection
(Matrix independent)
Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO QRP
Moisture monitor for low-pressure chambers (down to 1 Torr)
H2O 0 – 12 mTorrpp
(1200 ppm @ 10 Torr)
1 μTorrpp
(see chart for ppb units)
0.7 μTorrpp
(see chart for ppb units)
± 5% or ½ LDL ± 1% or ⅓ sensitivity N/A 1 Torr – 100 Torr
(1 Torr – 1000 Torr optional)
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2
ppb-level hydrogen detection
H2 in N2 0 – 500 ppm 10 ppb 8 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 slpm (± 20%) 10 – 125 psig (sample)
20 – 125 psig (Utility gas)
H2 in Ar 0 – 200 ppm 8 ppb 6 ppb
H2 in He 0 – 125 ppm 5 ppb 4 ppb
H2 in O2 0 – 250 ppm 50 ppb 4 ppb
H2 in Clean Dry Air (CDA) 0 – 450 ppm 50 ppb 7 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 NH3
Trace-level ammonia
NH3 in N2 0 – 7 ppm 0.5 ppb 0.4 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ∼1 slpm 10 – 125 psig
NH3 in H2 0 – 6 ppm 0.4 ppb 0.3 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH2O
Trace-level formaldehyde
CH2O in N2 0 – 40 ppm 4 ppb 2.5 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity <1 slpm 10 – 125 psig
CH2O in H2 0 – 40 ppm 5 ppb 3 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2O in N2O
Trace moisture analyzer for pure nitrous oxide
H2O in N2 0 – 20 ppm 3 ppb 2.2 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
H2O in N2O 0 – 20 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 N2O
Sub-ppm nitrous oxide detection in nitrogen
N2O in N2 0 – 1000 ppm 250 ppb 200 ppb ± 4% or ½ LDL ± 1% or 1/3 of Sensitivity up to 1.0 slpm 10 – 125 psig
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO OK
Trace oxygen detection as low as 50 ppt
O2 in He 0 – 0.5 ppm 50 ppt 17 ppt ± 4% or LDL ± 0.75% or ⅓ LDL 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig (sample)
20 – 125 psig (H2 supply)
O2 in Ar 0 – 1 ppm 90 ppt 30 ppt
O2 in H2 0 – 2 ppm 150 ppt 50 ppt
O2 in N2 0 – 2.5 ppm 200 ppt 70 ppt
O2 in CO2§ 0 – 5 ppm 800 ppt 300 ppt
§Special configuration required,
must be specified at time of order.