Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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LaserTrace Specification Summary

Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 H2O
Ultimate performance for ppt-level moisture detection
H2O in N2 0 – 5 ppm 200 ppt 70 ppt ± 3% or LDL ± 0.75% or ⅓ LDL 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
H2O in He 0 – 1 ppm 100 ppt 17 ppt
H2O in Ar 0 – 2 ppm 100 ppt 30 ppt
H2O in H2 0 – 4 ppm 150 ppt 50 ppt
H2O in O2 0 – 2.5 ppm 100 ppt 40 ppt
H2O in CO2 0 – 10 ppm 800 ppt 300 ppt
H2O in SF6 0 – 4 ppm 400 ppt 140 ppt
H2O in NF3 0 – 4 ppm 600 ppt 200 ppt
H2O in CF4 0 – 4 ppm 750 ppt 250 ppt
H2O in C2F6 0 – 5 ppm 1200 ppt 400 ppt
H2O in C3F8 0 – 5 ppm 1200 ppt 400 ppt
H2O in C4F6 0 – 7 ppm 150 ppb 50 ppb
H2O in C4F8 0 – 5 ppm 1200 ppt 400 ppt
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 O2
Ultimate performance for ppt-level oxygen detection
O2 in N2 0 – 2.5 ppm 100 ppt 40 ppt ± 3% or LDL ± 0.75% or ⅓ LDL 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
O2 in He 0 – 0.5 ppm 50 ppt 9 ppt
O2 in Ar 0 – 1 ppm 50 ppt 17 ppt
O2 in H2 0 – 2 ppm 75 ppt 25 ppt
O2 in CO2 0 – 5 ppm 800 ppt 300 ppt
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 CH4
Sub-ppb-level methane detection
CH4 in N2 0 – 8 ppm 1.0 ppb 0.8 ppb ± 3% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.9 – 3.9 slpm
(gas dependent)
30 – 125 psig
CH4 in He 0 – 5 ppm 0.7 ppb 0.5 ppb
CH4 in Ar 0 – 7 ppm 0.9 ppb 0.7 ppb
CH4 in H2 0 – 8 ppm 1.0 ppb 0.8 ppb
CH4 in O2 0 – 5 ppm 0.7 ppb 0.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 2.5 H2O
High-performance ppt-level moisture detection
H2O in N2 0 – 5 ppm 500 ppt 400 ppt ± 4% or ½ LDL ± 0.75% or ⅓ of Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
H2O in He 0 – 1 ppm 200 ppt 100 ppt
H2O in Ar 0 – 2 ppm 220 ppt 180 ppt
H2O in H2 0 – 4 ppm 400 ppt 300 ppt
H2O in O2 0 – 2.5 ppm 250 ppt 200 ppt
H2O in CO2 0 – 10 ppm 1000 ppt 800 ppt
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 2.5 O2
High-performance ppt-level oxygen detection
O2 in N2 0 – 2.5 ppm 250 ppt 200 ppt ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
O2 in He 0 – 0.5 ppm 100 ppt 50 ppt
O2 in Ar 0 – 1 ppm 110 ppt 90 ppt
O2 in H2 0 – 2 ppm 180 ppt 150 ppt
O2 in CO2 0 – 5 ppm 1000 ppt 400 ppt