Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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T-I Max Specification Summary

Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HF
Next-Generation AMC Monitor
HF in Cleanroom Air 0 – 1 ppm 20 ppt < 3 minutes ± 4% or LDL ± 0.5% or ⅓ LDL ∼2.0 slpm 0 – 15 psig
Product Detection and Matrix Range Target LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HCl
Next-Generation AMC Monitor
HCl in Cleanroom Air 0 – 4 ppm 45 ppt < 30 seconds ± 4% or LDL ± 0.5% or ⅓ LDL ∼2.0 slpm 0 – 15 psig
Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max NH3
Next-Generation AMC Monitor
NH3 in Cleanroom Air 0 – 40 ppm 300 ppt < 3 minutes ± 4% or LDL ± 0.5% or ⅓ LDL ∼2.0 slpm 0 – 15 psig