As the International Roadmap for Devices and Systems (IRDS) drives the semiconductor industry beyond Moore’s Law and sets the requirements for the next decade, Tiger Optics accepts the challenge with the HALO KA Max CH4.
Building on Tiger Optics’ customer-acknowledged and renowned time-based technology—Continuous-Wave Cavity Ring-Down Spectroscopy—users can verify methane impurity levels down to 500 ppt or less in semi bulk gases, with drift-free stability and virtually instant response to upsets.
The HALO KA Max CH4, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA Max CH4 excels in trace-level methane detection in bulk gases and specialty gases used in semiconductor manufacturing.
Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
---|---|---|---|
CH4 in N2 | 0 – 8 ppm | 500 ppt | 200 ppt |
CH4 in He | 0 – 5 ppm | 400 ppt | 140 ppt |
CH4 in Ar | 0 – 7 ppm | 450 ppt | 150 ppt |
CH4 in H2 | 0 – 8 ppm | 500 ppt | 200 ppt |
CH4 in O2 | 0 – 7 ppm | 500 ppt | 200 ppt |
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection Limit (3σ/24h) | See Detection Capability table |
Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
Accuracy (greater of) | ± 4% or LDL |
Speed of response | < 1 minute to 95% |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions | |
Gas connections | 1/4” male VCR inlet and outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
Flow rate | ∼2 slpm in N2 (gas dependent) |
Sample gases | See Detection Capability table |
Gas temperature | Up to 60°C |
Dimensions, H x W x D | |
Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
Weight | |
Standard sensor | 28 lbs (12.7 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
Power requirements | 90 − 240 VAC, 50/60 Hz |
Power consumption | 40 Watts max. |
Signal output | Isolated 4−20 mA |
User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 |
*The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher
Tiger Optics, LLC
275 Gibraltar Road
Horsham, PA 19044
USA