Semiconductor and High Brightness LED manufacturers rely on ultra-high purity process gases, such as ammonia and phosphine, to build the high-tech products such as smartphones, LED TVs and light bulbs, along with CPU and memory chips that consumers desire. Residual moisture in these critical gases degrade device performance, reduce yield, and negatively impact product and corporate profitability. The HALO LP H2O analyzer is designed to provide users with a simple, cost-effective, and compact analyzer for ensuring trace levels of moisture in NH3, PH3, AsH3 and other hydrides are within the required specifications.
Incorporating an absolute pressure controller, the LP (low pressure) version of this analyzer allows users to measure moisture in hydride gases with unmatched accuracy, reliability, and speed of response. Evidenced by our global installed base of about 2000 sensors, users enjoy the freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuild that are commonplace with other technologies. As a result, Tiger Optics’ HALO LP H2O is relied on as an industry leader in the detection of trace moisture levels in ammonia and phosphine for electronic manufacturers and specialty gas suppliers worldwide.
Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
---|---|---|---|
Standard Model | |||
H2O in NH3 | 0 – 20 ppm | 9 ppb | 3 ppb |
H2O in PH3† | 0 – 10 ppm | 9 ppb | 3 ppb |
H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
H2O in Ar | 0 – 4 ppm | 0.8 ppb | 0.25 ppb |
H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
H2O in He | 0 – 3 ppm | 0.6 ppb | 0.2 ppb |
H2O in NO† | 0 – 100 ppm | 16 ppb | 6 ppb |
H2O in GeH4† | 0 – 18 ppm | 20 ppb | 7 ppb |
H2O in 5% SiH4/95% N2† | 0 – 6 ppm | 20 ppb | 7 ppb |
Arsine Model | |||
H2O in AsH3† | 0 – 10 ppm | 5 ppb | 2 ppb |
H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
H2O in Ar | 0 – 4 ppm | 1.0 ppb | 0.3 ppb |
H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
H2O in He | 0 – 3 ppm | 1.0 ppb | 0.3 ppb |
†Low leak rate vacuum pump (safety certified for service in relevant gas) required
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection limit (LDL, 3σ/24h) | See Detection Capability table |
Precision (1σ, greater of) | ± 1% or 1/3 of LDL |
Accuracy (greater of) | ± 4% or LDL |
Speed of response | < 3 minutes to 95% |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions* | |
Wetted materials | 316 stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
Gas connections | 1/4″ male VCR inlet and outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Inlet pressure | 10 – 125 psig (1.7 – 9.6 bara) |
Outlet pressure | < 10 Torr (13 mbar) |
Flow rate | Up to 1.0 slpm |
Sample gases | Ammonia, phosphine, arsine and inert matrices |
Gas temperature | Up to 60°C |
Dimensions | |
Standard sensor (incl. shutoff valves) | 8.73″ x 8.57″ x 26.4″ (222 mm x 218 mm x 670 mm) |
Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 26.4″ (222 mm x 483 mm x 670 mm) |
Weight | |
Standard sensor | 33 lbs (15.0 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form-C relay |
Power requirements | 90 − 240 VAC, 50/60 Hz |
Power consumption | 40 Watts max. (excl. vacuum pump) |
Signal output | Isolated 4–20 mA per sensor |
User interfaces | 5.7″ LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 |
*Vacuum source required
Tiger Optics, LLC
275 Gibraltar Road
Horsham, PA 19044
USA