HALO LP H2O

Trace moisture in hydride gases

Simple and powerful trace moisture detection in hydride gases

Semiconductor and High Brightness LED manufacturers rely on ultra-high purity process gases, such as ammonia and phosphine, to build the high-tech products such as smartphones, LED TVs and light bulbs, along with CPU and memory chips that consumers desire. Residual moisture in these critical gases degrade device performance, reduce yield, and negatively impact product and corporate profitability. The HALO LP H2O analyzer is designed to provide users with a simple, cost-effective, and compact analyzer for ensuring trace levels of moisture in NH3, PH3, AsH3 and other hydrides are within the required specifications.

Incorporating an absolute pressure controller, the LP (low pressure) version of this analyzer allows users to measure moisture in hydride gases with unmatched accuracy, reliability, and speed of response. Evidenced by our global installed base of about 2000 sensors, users enjoy the freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuild that are commonplace with other technologies. As a result, Tiger Optics’ HALO LP H2O is relied on as an industry leader in the detection of trace moisture levels in ammonia and phosphine for electronic manufacturers and specialty gas suppliers worldwide.

Designed for trace level moisture analysis, the HALO LP H2O offers:

  • Low parts per billion (ppb) moisture detection capability in NH3, PH3, AsH3, GeH4 and SiH4
  • Absolute measurement (freedom from calibration gases)
  • Wide dynamic range – over four orders of magnitude
  • Low cost of ownership and operational simplicity
  • Clean technology – no external calibration gases required
  • Compact analyzer footprint
  • User-programmable alarms immediately notify on high events

Applications

  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Research & Development
  • UHP Ammonia & High-Brightness LEDs

DETECTION CAPABILITY

Detection and Matrix         Range              LDL (3σ)       Precision (1σ) @ zero
Standard Model      
H2O in NH3 0 – 20 ppm 9 ppb 3 ppb
H2O in PH3† 0 – 10 ppm 9 ppb 3 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 0.8 ppb 0.25 ppb
H2O in H2† 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 0.6 ppb 0.2 ppb
H2O in NO† 0 – 100 ppm 16 ppb 6 ppb
H2O in GeH4† 0 – 18 ppm 20 ppb 7 ppb
H2O in 5% SiH4/95% N2† 0 – 6 ppm 20 ppb 7 ppb
Arsine Model      
H2O in AsH3† 0 – 10 ppm 5 ppb 2 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 1.0 ppb 0.3 ppb
H2O in H2† 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.3 ppb

†Low leak rate vacuum pump (safety certified for service in relevant gas) required

SPECIFICATIONS

Performance
Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 1% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 3 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions*
Wetted materials 316 stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4″ male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 – 125 psig (1.7 – 9.6 bara)
Outlet pressure < 10 Torr (13 mbar)
Flow rate Up to 1.0 slpm
Sample gases Ammonia, phosphine, arsine and inert matrices
Gas temperature Up to 60°C
Dimensions
Standard sensor (incl. shutoff valves) 8.73″ x 8.57″ x 26.4″ (222 mm x 218 mm x 670 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 26.4″ (222 mm x 483 mm x 670 mm)
Weight
Standard sensor 33 lbs (15.0 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form-C relay
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max. (excl. vacuum pump)
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7″ LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177  

*Vacuum source required

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