Expanding Optical Contaminant Detection Capabilities for Semiconductor Manufacturing

Tiger Optics takes Cavity Ring-Down Spectroscopy (CRDS) to the next level by bringing you the latest optical technology. Utilizing mid-infrared Quantum Cascade Lasers (QCLs), the new HALO Max QCL allows dramatic decreases in detection limits for certain molecules, such as CO.

Introducing the HALO Max QCL CO for ppt-level carbon monoxide detection, it is based on Tiger Optics’ latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.

The HALO Max QCL CO perfectly complement Tiger’s HALO KA Max series (for H₂O, NH₃ and CH₄), the HALO OK (for O₂) and our other QCL-based analyzer, the HALO Max QCL CO₂ to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.

Our first analyzer series based on Quantum Cascade Laser Cavity Ring-Down Spectroscopy (QCL-CRDS), the HALO Max QCL CO offers:

• Parts-per-trillion (ppt) detection capability for carbon monoxide (CO) in UHP bulk gases
• Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity
• Absolute measurement (freedom from calibration)
• Excellent speed of response at ppb levels and below
• Continuous measurement—no batch processing typical with GCs
• Robust design & maximum ease of use