HALO Max QCL CO2

PPT level carbon dioxide analyzer

  • Gas Quality Control
  • High-Purity Gases & Systems
  • Research & Development
  • Semiconductor Process Tools

DETECTION CAPABILITY

Detection and Matrix    Range               LDL* (3σ)     Precision (1σ) @ zero
CO2 in N2 0 – 2.5 ppm 100 ppt 35 ppt
CO2 in He 0 – 2 ppm 90 ppt 30 ppt
CO2 in Ar 0 – 2 ppm 80 ppt 25 ppt
CO2 in H2 0 – 4 ppm 180 ppt 60 ppt
CO2 in O2 0 – 2 ppm 90 ppt 30 ppt
CO2 in Clean Dry Air (CDA) 0 – 2.5 ppm 100 ppt 35 ppt

*Due to the high abundance of CO2 in air, purging of the analyzer housing is required to achieve specified LDL (see brochure for purge gas requirements)

SPECIFICATIONS

Performance
Operating range See Detection Capability table
Detection Limit (LDL) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 6 − 125 psig (1.4 − 9.6 bara)
Flow rate <1 slpm in N2 (gas dependent)
Sample gases Most inert and passive gases
Gas temperature Up to 60°C
Purge gas Inert gas (e.g. N2), <1 ppm CO2, 30 − 150 psig, 4 − 5 slpm
Purge gas connection 1/8″ Swagelok®
Dimensions, H x W x D
Standard sensor 8.75″ x 19.0″ x 24.0″ (222 mm x 483 mm x 610 mm)
Weight
Standard sensor 60 lbs (27 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 100 Watts max.
Signal output Isolated 4−20 mA
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177  

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