Modern semiconductor deposition processes—from low-temperature epitaxy to ALD and MOCVD—operate routinely at chamber pressures far below atmosphere and approach the single-digit torr range. At the same time, process temperatures are continuously decreasing. Under these conditions, residual moisture in the chamber poses a significant threat to process quality and production yields.
Tiger Optics’ new HALO QRP is optimized to operate under these low-pressure conditions and deliver exact and reliable real-time measurement to verify moisture residue in, for example, the load lock, transfer and process chambers before H2O contaminants compromise the subsequent process step. Based on Tiger Optics’ proven Cavity Ring-Down Spectroscopy (CRDS) technology, the HALO QRP sets new standards in ease-of-use and measurement precision for this application and operates at chamber pressures as low as 1 Torr.
Detection (Matrix independent) |
Range | LDL (peak-to-peak) | Sensitivity (3σ) |
---|---|---|---|
H2O | 0 – 12 mTorrpp (1200 ppm @ 10 Torr) |
1 μTorrpp (see chart for ppb units) |
0.5 μTorrpp (see chart for ppb units) |
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection limit (LDL, 24 h peak-to-peak) | See Detection Capability table |
Sensitivity (3σ) | See Detection Capability table |
Precision (1σ, greater of) | ± 1% or 1/3 of Sensitivity |
Accuracy (greater of) | ± 5% or 1/2 of LDL |
Speed of response | 1 to 2 minutes (if not flow-limited) |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions* | |
Wetted materials | 316L stainless steel (corrosive gas version optional), 10 Ra surface finish |
Gas connections | 1/4″ male VCR inlet & outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Inlet pressure† | 1 – 1000 Torr |
Outlet pressure | <20 mTorr (0.027 mbar) |
Sample gases§ | N2, H2, HCl, Ar (standard); He, Cl2 (optional) |
Gas temperature | Up to 60°C (in detection cell) |
Dimensions, H x W x D | |
Standard sensor (incl. shutoff valves) | 8.73″ x 8.57″ x 26.4″ (222 mm x 218 mm x 670 mm) |
Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 26.4″ (222 mm x 483 mm x 670 mm) |
Weight | |
Standard sensor | 30 lbs (13.4 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
Power requirements | 90 – 240 VAC 50/60 Hz |
Power consumption | 40 Watts max. |
Signal output | Isolated 4–20 mA per sensor |
User interfaces | 5.7″ LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 |
*Vacuum source required
†Pressure requirements for moisture measurement − for gas purge in standby mode, inlet pressure limit
is 15 psig (1500 Torr)
§HCl and Cl2 sample gases may require corrosive gas version, please contact us for more information.
Tiger Optics, LLC
275 Gibraltar Road
Horsham, PA 19044
USA