HALO QRP

Moisture monitoring for low-pressure chambers 

SPECIFICATIONS

Performance
Operating range See Detection Capability table
Detection limit (LDL, 24 h peak-to-peak) See Detection Capability table
Sensitivity (3σ) See Detection Capability table
Precision (1σ, greater of) ± 1% or 1/3 of Sensitivity
Accuracy (greater of) ± 5% or 1/2 of LDL
Speed of response 1 to 2 minutes (if not flow-limited)
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions*
Wetted materials 316L stainless steel (corrosive gas version optional), 10 Ra surface finish
Gas connections 1/4″ male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 1 – 1000 Torr
Outlet pressure <20 mTorr (0.027 mbar)
Sample gases§ N2, H2, HCl, Ar (standard); He, Cl2 (optional)
Gas temperature Up to 60°C (in detection cell)
Dimensions, H x W x D
Standard sensor (incl. shutoff valves) 8.73″ x 8.57″ x 26.4″ (222 mm x 218 mm x 670 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 26.4″ (222 mm x 483 mm x 670 mm)
Weight
Standard sensor 30 lbs (13.4 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7″ LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177  

*Vacuum source required
Pressure requirements for moisture measurement − for gas purge in standby mode, inlet pressure limit
is 15 psig (1500 Torr)
§HCl and Cl2 sample gases may require corrosive gas version, please contact us for more information.

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