Airborne Molecular Contaminants

Real-Time Solutions for Airborne Molecular Contamination 

Air quality and climate change are two key issues that drive requirements for detection and analysis of atmospheric molecules.  Airborne Molecular Contamination is a concern for high technology manufacturing process like in the semiconductor industry.  Airborne contaminants reduce yield-quality, impact tools, and are costly when not controlled.

With high precision, sensitivity and specificity, the Tiger Optics Cavity Ring-Down Spectroscopy (CRDS) gas analyzer is one of the best analytical methods available to monitor contaminants, pollutants and greenhouse gases, without interference from moisture and other atmospheric constituents.  Gain continuous measurements easily with little or no maintenance and few consumables. 

Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop.  The T-I Max CEM analyzers monitor critical HCl, HF, NH3 and more in cleanroom environments.  The Tiger Optics CRDS technology makes measurements easy and free of interferences from other contaminants.  The T-I Max AIR CO2 is designed to monitor in ambient air, both indoors and outdoors, monitor emissions and background levels of pollutants.

Options Available:

  • Standalone
  • Rack-mounted AMC Combo (HCl/HF, HCl/NH3 or HF/NH3)
  • AMC Mobile Cart (with up to three analyzers)

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Applications

  • Semiconductor Industry AMC Monitoring
      • Cleanroom air
      • Front Opening Unified Pods (FOUPs)
      • Silicon wafers
  • Continuous monitoring of air quality pollutants in other microelectronics manufacturing
  • Continuous and precise measurement of Greenhouse Gas (GHG) monitoring

Product Guide
Solutions for the Semiconductor Industry
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