Since their initial market introduction in 2001, Tiger Optics’ Cavity Ring-Down Spectroscopy (CRDS) trace gas analyzers have supported the semiconductor industry and other micro-electronic manufacturing sectors, based on their superior sensitivity, great stability and unparalleled uptime. Free of periodic maintenance, with no moving parts or consumables, featuring built-in calibration and zero drift, Tiger’s CRDS analyzers are the top choice of the world’s leading semiconductor fabs. Based solely on experience with our analyzers, SEMI F-112 designates CRDS as the standard in determining moisture dry-down characteristics of ultra-high-purity gases and their respective delivery systems.
Based upon Tiger’s performance, the SEMI F-112 standard calls out CRDS as the technology of choice in determining moisture dry-down characteristics of high-purity gas systems. To check incoming or point-of-use quality, Tiger’s CRDS analyzers monitor for O2, H2O, CH4, CO, CO2 and more down to parts-per-billion (ppb) and even parts-per-trillion (ppt) levels. A special low-pressure version, the HALO LP monitors for impurities in hydrides, including arsine, phosphine and ammonia. If low-ppb moisture measurement in pure ammonia is required, the ALOHA+ H2O specializes in this application.
The Tiger Optics analyzer portfolio also delivers bulk gas monitoring for trace H2, H2O, O2, CH4, CO, CO2, Kr, NH3, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H2O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH3.
Key advantages of the Tiger Optics CRDS analyzers for UHP Gas Analysis include:
Explore Extrel for AMC monitoring. Extrel is a Process Insights brand. The Extrel VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Learn more about our real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more.
The Tiger Optics HALO and T-I Max systems are used extensively in Atomic Layer Deposition (ALD), Low-Temperature Epitaxy and MOCVD chambers. The ability to measure moisture in chamber exhaust lines provides a total quality check for incoming gases, cleaning gases, chamber state and/or leaks and purge procedures.
The HALO RP and LaserTrace 3x systems operate at pressures as low as 50 Torr. While the HALO RP is a single-channel system, the LaserTrace 3x can monitor up to four points at the chamber simultaneously during purge or ramp steps in the standard production runs. The new HALO QRP has been developed to monitor the latest generation of tools at pressures as low as 1 Torr (and below). Its fast speed of response and wide pressure range (as high as 1000 Torr) allows the use of a manifold system to connect multiple load locks, wafer transfer and deposition chambers to a single instrument.
Tiger offers the ALOHA+ H2O, the ultimate moisture-in-ammonia analyzer that refines the detection to levels below 3 ppb, achieving significantly improved sensitivity compared to the leading analyzer to date. The HALO LP H2O is the standard bearer for this application with a detection limit of 9 ppb. Both Tiger analyzers exceeds the industry’s need to detect moisture in ammonia at 12 ppb or less. Higher concentrations of moisture negatively affect the luminescence of HB LEDs and diminish process yields.
High-brightness LEDs offer brighter, cooler light, with lower power consumption and longer life than traditional lighting. Tool manufacturers and the gas companies supplying ammonia use Tiger’s analyzers for moisture analysis in ammonia, which is the favored source of nitrogen for the production of gallium nitride (GaN) compound semiconductor wafers. Tiger’s best-in-class analyzers can ensure ultra-dry ammonia throughout the process, from the gas bottle to the MOCVD tool. To monitor directly at the tool level, Tiger Optics offers the HALO RP and HALO QRP, which are designed for low-pressure environments.