Semiconductor, Electronics & HB LED

Leading Gas Analysis Solutions for the Semiconductor, Electronics & HD LED Industries

Since their initial market introduction in 2001, Tiger Optics’ Cavity Ring-Down Spectroscopy (CRDS) trace gas analyzers have supported the semiconductor industry and other micro-electronic manufacturing sectors, based on their superior sensitivity, great stability and unparalleled uptime. Free of periodic maintenance, with no moving parts or consumables, featuring built-in calibration and zero drift, Tiger’s CRDS analyzers are the top choice of the world’s leading semiconductor fabs. Based solely on experience with our analyzers, SEMI F-112 designates CRDS as the standard in determining moisture dry-down characteristics of ultra-high-purity gases and their respective delivery systems.

Based upon Tiger’s performance, the SEMI F-112 standard calls out CRDS as the technology of choice in determining moisture dry-down characteristics of high-purity gas systems. To check incoming or point-of-use quality, Tiger’s CRDS analyzers monitor for O2, H2O, CH4, CO, CO2 and more down to parts-per-billion (ppb) and even parts-per-trillion (ppt) levels. A special low-pressure version, the HALO LP monitors for impurities in hydrides, including arsine, phosphine and ammonia. If low-ppb moisture measurement in pure ammonia is required, the ALOHA+ H2O specializes in this application.

The Tiger Optics analyzer portfolio also delivers bulk gas monitoring for trace H2, H2O, O2, CH4, CO, CO2, Kr, NH3, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H2O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH3.

Key advantages of the Tiger Optics CRDS analyzers for UHP Gas Analysis include:

  • Industry-best ppt-level analysis for CO, CO2 and CH4 impurities
  • Continuous, real-time measurement
  • High reliability, low maintenance
  • Response time within seconds
  • Low cost of ownership
  • No calibration requirements
  • No carrier gas requirements
  • Easy to install, start up and use

APPLICATIONS

  • Airborne Molecular Contaminants
  • High-Purity Gases & Systems
  • Low-Temperature SixGey Epitaxy
  • Atomic Layer Deposition (ALD)  
  • MOCVD
  • UHP Ammonia & High-Brightness LEDs
  • Ultra-High-Purity Ammonia
  • MOCVD

OUR SOLUTIONS DELIVER:

  • Improved reliability
  • Lower cost of ownership 
  • Improved product quality
  • Efficiency
  • Meet compliance requirements
  • Backed by global service and support

We are committed to solving our customers’ most complex analytical and process challenges.

SERVICE | SALES | TRAINING

Americas +1 (215) 656-4000
EMEA +49 69 20436910
China/APAC +86 400 086 0106

sales@tigeroptics.com

ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS) – EXTREL

Explore Extrel for AMC monitoring.  Extrel is a Process Insights brand. The Extrel VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.  Learn more about our real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more.

Semiconductor Process Tools

The Tiger Optics HALO and T-I Max systems are used extensively in Atomic Layer Deposition (ALD), Low-Temperature Epitaxy and MOCVD chambers. The ability to measure moisture in chamber exhaust lines provides a total quality check for incoming gases, cleaning gases, chamber state and/or leaks and purge procedures. 

The HALO RP and LaserTrace 3x systems operate at pressures as low as 50 Torr. While the HALO RP is a single-channel system, the LaserTrace 3x can monitor up to four points at the chamber simultaneously during purge or ramp steps in the standard production runs. The new HALO QRP has been developed to monitor the latest generation of tools at pressures as low as 1 Torr (and below). Its fast speed of response and wide pressure range (as high as 1000 Torr) allows the use of a manifold system to connect multiple load locks, wafer transfer and deposition chambers to a single instrument.

UHP AMMONIA & HIGH-BRIGHTNESS LEDS

Tiger offers the ALOHA+ H2O, the ultimate moisture-in-ammonia analyzer that refines the detection to levels below 3 ppb, achieving significantly improved sensitivity compared to the leading analyzer to date. The HALO LP H2O is the standard bearer for this application with a detection limit of 9 ppb. Both Tiger analyzers exceeds the industry’s need to detect moisture in ammonia at 12 ppb or less. Higher concentrations of moisture negatively affect the luminescence of HB LEDs and diminish process yields.

High-brightness LEDs offer brighter, cooler light, with lower power consumption and longer life than traditional lighting. Tool manufacturers and the gas companies supplying ammonia use Tiger’s analyzers for moisture analysis in ammonia, which is the favored source of nitrogen for the production of gallium nitride (GaN) compound semiconductor wafers. Tiger’s best-in-class analyzers can ensure ultra-dry ammonia throughout the process, from the gas bottle to the MOCVD tool. To monitor directly at the tool level, Tiger Optics offers the HALO RP and HALO QRP, which are designed for low-pressure environments.

NEW Extrel APIMS

Applications

  • Low-Temperature SixGey Epitaxy
  • Atomic Layer Deposition (ALD)  
  • MOCVD

Applications

  • Ultra-High-Purity Ammonia
  • MOCVD

Our Other CRDS Analyzer Solutions

T-I Max HCl

Next-Generation AMC Monitor

T-I Max HF

Next-Generation AMC Monitor

T-I Max NH3

Next-Generation AMC Monitor

Spark H2O

Trace moisture detection as low as 3 ppb

Spark CH4

Trace-level methane detection

Spark C2H2

Trace-level acetylene detection

Spark+ CO

Trace-level carbon monoxide detection

Spark CO2

Trace-level carbon dioxide detection

Spark H2O in CO2

Trace moisture detection in pure CO2

HALO KA Max H2O

Ultimate part-per-trillion moisture detection

HALO KA Max CH4

Sub-ppb methane detection in bulk gases

HALO KA Max NH3

ppt-level ammonia detection in bulk gases

HALO MAX QCL CO

ppb-level carbon monoxide analyzer

HALO Max QCL CO2

ppb-level carbon dioxide analyzer

HALO KA H2O

Part-per-trillion detection limits for H2O

HALO OK

Trace oxygen detection as low as 50 ppt

HALO 3 H2O

Trace moisture analyzer for ultra-high-purity gases

HALO 3 CO

Part-per-billion carbon monoxide detection

HALO 3 CO2

Part-per-billion carbon dioxide detection

HALO 3 CH4

Trace methane analyzer for high-purity gases

HALO 3 HF

Trace hydrogen fluoride in pressurized gases

HALO 3 HCl

Trace hydrogen chloride

HALO 3 NH3

Trace-level ammonia

HALO 3 D2O/HDO

Trace-level heavy water analyzer

HALO 3 CH2O

Trace-level formaldehyde

HALO H2

ppb-level hydrogen detection

HALO LP H2O

Trace moisture in hydride gases

HALO QRP

Moisture monitoring for low-pressure chambers

HALO RP

Trace H2O and HF for sub-atmospheric pressure

HALO H2O in N2O

Trace moisture analyzer for pure nitrous oxide

Prismatic 3

Multi-species gas analyzer

CO-rekt

Measuring CO, CO2 , CH4 or H2O in NEMA-rated enclosure

T-I Max CEM

Next-Generation CEM analyzer for HCI, HF, NH3 and more

T-I Max AIR CH2O

Trace formaldehyde in ambient air

T-I Max AIR CH4

Methane analyzer for greenhouse gas detection and monitoring

T-I Max AIR CO2

CO2 analyzer for greenhouse gas monitoring

ALOHA+ H2O

3 ppb H2O detection in ultra-pure ammonia

GO-cart

Your Flexible Solution for AMC Monitoring


Application Notes

Next-Generation Monitoring of Airborne Molecular Contaminants in Cleanrooms
Parts-Per-Trillion Moisture Detection in Electronic-Grade Bulk Gases
Real-Time ppt-Level Analysis of CO, CO2 and CH4 in Semiconductor UHP Gas
Moisture Monitoring in Low-Temperature Silicon-Germanium Epitaxy

Questions? We’re here to help.