T-I Max HF

continuous monitoring of Airborne Molecular Contaminants


Operation range See Detection Capability table
Detection limit (LDL, 3σ@100s) See Detection Capability table
Precision (1σ@100s, greater of) ± 0.5% or 1/3 of LDL
Accuracy at span ± 4% of reading
Accuracy at zero ± 20 ppt
Speed of response @ 20 ppb) See Detection Capability table
Environmental conditions 10°C to 40°C, 10% to 90% RH (non-condensing)
Sample conditions 30% to 70% RH at 20°C
  20% to 50% RH at 25°C
  15% to 40% RH at 30°C
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Optimized for ppt-level AMCs and fast speed of response
Gas connections 1/4″ PFA Swagelok® inlet & outlet
Inlet pressure Atmospheric pressure
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼2 slpm @ 1 atm inlet pressure
Sample gases Cleanroom air, clean dry air (CDA) or N2
Gas temperature Up to 60°C
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
GO-cart 50″ x 23″ x 36″ (1270 mm x 584 mm x 914 mm)
Standard sensor 33 lbs (15 kg)
GO-cart 260 lbs (118 kg)
(excl. vacuum pump)  
Electrical and Interfaces
Platform Max series analyzers
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7″ LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
U.S. Patent # 7,277,177  

*Vacuum source with >2 slpm @ 10 Torr required
Contact us for details about operating the analyzer at elevated inlet pressure.

Questions? We’re here to help.